Abstract:
In this work, we concerned a study and simulation of micro-sensor surface acoustic wave SAW using the Comsol multi- physique. A sensor SAW constructed of an interdigité transducer (IDT) engraved on a piezoelectric material and covered by a layer sensitive Polyisobutyléne (PIB). Our contribution has focused on determining the effects of influence parameters on the response of a SAW sensor and its sensitivity to mass effect. A comparative study of the response of the SAW sensor (Δ
