Modélisation de mécanismes se produisant dans un plasma de dépôt

Abstract

The present work is to develop a single and multi-dimensional numerical model to describe the transport phenomena of charged and excited species in a cold plasma microreactor. For that, we first developed a simple fluid model using the drift and diffusion approximation containing only the ionization process in continuous mode and simulated by the finite volume method written in FORTRAN code. Eventually we developed this model by exploiting the commercial software Comsol, for a digital micro-hollow cathode discharge study submitted to radiofrequency excitation. The two dimensional simulation performed allowed us to do a study on the effect of control parameters, such as pressure, gaz temperature and frequency on the change in the electron density , the electron temperature , potential, and reaction rates of various chemical process.