Etude des parametres physiques qui gouvernent la resolution en profondeur en microsonde ionique

Abstract

The physical events results during SIMS analysis produced by the bombardment of the ions on the medium disturb its original constitution; the essential event was the collisional mixing. This work consists in finding the physical parameters associated to the transport of ions in amorphous monoatomic solid bombarded with normally incident at different high dose irradiation. The theoretical formulation is based on linear Boltzman transport equation of ions. This theory allowed to describe these physical parameters in the presence of the collisional mixing, these parameters control the in-depth resolution. Indeed, this work shows the evolution of the in-depth resolution with various input experimental parameters (ion beam nature, energy, dose and the target nature) for got good working conditions of optimized analysis, so to lead a better in-depth resolution.