Browsing 2ème Journées Internationales de Physique de Constantine 14 et 15 Décembre 2016 by Subject "AlN thin films"

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Texture growth of AlN films deposited on Si(100) and (111) by DC reactive magnetron sputtering (dcMS) and by high power impulse magnetron sputtering (HiPIMS)

Riah, B.; Ayad, A.; Camus, J.; Djouadi, M.A.; Rouag, N. (Université Frères Mentouri - Constantine 1, 2016-12-14)

We have studied the texture evolution of Aluminum nitride (AlN) thin. AlN thin films were deposited on Si (100) substrate by dc magnetron sputtering (dcMS) and High Power Impulse Magnetron Sputtering (HiPIMS) technics.We ...

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